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ISO 16700:2016
ISO 16700:2016 Microbeam analysis – Scanning electron microscopy – Guidelines for calibrating image magnification
CDN $173.00
Description
ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.
Edition
2
Published Date
2016-07-18
Status
PUBLISHED
Pages
18
Language
English
Format
Secure PDF
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Abstract
ISO 16700:2016 specifies a method for calibrating the magnification of images generated by a scanning electron microscope (SEM) using an appropriate reference material. This method is limited to magnifications determined by the available size range of structures in the calibrating reference material. It does not apply to the dedicated critical dimension measurement SEM.
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