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ISO 63258:2021
ISO 63258:2021 Nanotechnologies – A guideline for ellipsometry application to evaluate the thickness of nanoscale films
CDN $71.00
SKU: 11daa1b371da
Categories: ICS:07.120, SUSTAINABLE_DEVELOPMENT_GOAL:9
Description
IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.
Edition
1
Published Date
2021-03-22
Status
PUBLISHED
Pages
16
Format 
Secure PDF
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Abstract
IEC TR 63258:2021 is a Technical Report focused on the practical protocol of ellipsometry to evaluate the thickness of nanoscale films. This document does not include any specification of the ellipsometers, but suggests how to minimize the data variation to improve data reproducibility.
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