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ISO 18115:2022
ISO 18115:2022 Surface chemical analysis – Vocabulary – Part 3: Terms used in optical interface analysis
CDN $76.00
Description
This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.
Edition
1
Published Date
2022-06-30
Status
PUBLISHED
Pages
35
Language
English
Format
Secure PDF
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Abstract
This document defines terms for surface chemical analysis in the area of optical interface analysis including ellipsometry, Raman spectroscopy and nonlinear optical techniques as well as general optical terms.
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